Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguides

Roelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162005-11https://imec-publications.be/handle/20.500.12860/11115Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguidesJournal article