Finite element simulations of the mechanical stress in and around TiSi2 lines

Steegen, AnAnSteegenDe Wolf, IngridIngridDe WolfMaex, KarenKarenMaexIgnat, M.M.Ignat2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2973Finite element simulations of the mechanical stress in and around TiSi2 linesProceedings paper