Machkaoutsan, VladimirVladimirMachkaoutsanPagès, X.X.PagèsBauer, M.M.BauerThomas, S.S.ThomasMertens, SofieSofieMertensVerheyden, K.K.VerheydenVanormelingen, KoenKoenVanormelingenGranneman, E.E.Granneman2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12531Thermal stability of Pt and C-doped NiSi filmsProceedings paper