Resolution improvement and dose reduction in logic and memory applications from low NA to high NA

Das, ShubhankarShubhankarDasBlanco, VictorVictorBlancoVan Tuong PhamJambaldinni, ShrutiShrutiJambaldinniDe Silva, AnujaAnujaDe SilvaFranke, Joern-HolgerJoern-HolgerFrankeNewman, MarcusMarcusNewmanHaider, AliAliHaiderGallagher, MattMattGallagherLee, JeonghoonJeonghoonLeeSah, KaushikKaushikSahChen, ZhijinZhijinChenCheng, BoboBoboChengGong, ChenweiChenweiGongRamanathan, VidyaVidyaRamanathanCross, AndrewAndrewCrossGillijns, WernerWernerGillijnsSuh, Hyo SeonHyo SeonSuhFoubert, PhilippePhilippeFoubertPetersen, JohnJohnPetersenVanelderen, PieterPieterVanelderenVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonseHalder, SandipSandipHalderLeray, PhilippePhilippeLeray2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200038https://imec-publications.be/handle/20.500.12860/45991Resolution improvement and dose reduction in logic and memory applications from low NA to high NAProceedings paper10.1117/12.3051512978-1-5106-8635-9WOS:001517286200038