On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers

Petry, JasmineJasminePetryVandervorst, WilfriedWilfriedVandervorstPantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeve2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11015On the data interpretation of the C-AFM measurements in the characterization of thin insulating layersJournal article