Ge FET fabrication by plasma etch at 45nm pitch

Milenin, AlexeyAlexeyMileninWitters, LiesbethLiesbethWitters2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24252Ge FET fabrication by plasma etch at 45nm pitchMeeting abstracthttps://ecs.confex.com/ecs/226/webprogram/Paper40500.html