Wiaux, VincentVincentWiauxPhilipsen, VickyVickyPhilipsenJonckheere, RikRikJonckheereVandenberghe, GeertGeertVandenbergheVerhaegen, StafStafVerhaegenHoffmann, ThomasThomasHoffmannRonse, KurtKurtRonseHoward, William B.William B.HowardMaurer, WilhelmWilhelmMaurerPreil, Moshe E.Moshe E.Preil2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7053Assessment of OPC effectiveness using two-dimensional metricsProceedings paper