Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate

Ghannam, MoustafaMoustafaGhannamHassan, Mostafa MedhatMostafa MedhatHassanDepauw, ValerieValerieDepauwBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/13762Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrateJournal article