Joshi, AbhijeetAbhijeetJoshiRengo, GianlucaGianlucaRengoPorret, ClémentClémentPorretLin, Kun-LinKun-LinLinChang, C-H.C-H.ChangBasol, BulentBulentBasol2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36823Characterization of annealing and dopant activation processes using Differential Hall Effect Metrology (DHEM)Proceedings paperhttps://doi.org/10.1149/10202.0113ecst