Line edge roughness: characterization, modeling and impact on device behavior

Croon, JeroenJeroenCroonStorms, GreetGreetStormsWinkelmeier, StephanieStephanieWinkelmeierPollentier, IvanIvanPollentierErcken, MoniqueMoniqueErckenDecoutere, StefaanStefaanDecoutereSansen, WillyWillySansenMaes, HermanHermanMaes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6157Line edge roughness: characterization, modeling and impact on device behaviorProceedings paper