Hermeticity investigation of sealed 0-level packages based on the damping characteristics of the MEMS device

Jourdain, AnneAnneJourdainDe Coster, JeroenJeroenDe CosterDe Moor, PietPietDe MoorPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10663Hermeticity investigation of sealed 0-level packages based on the damping characteristics of the MEMS deviceProceedings paper