Clarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstCollart, E. J. H.E. J. H.CollartMurell, A. J.A. J.Murell2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3301Electrical characterization of ultra shallow dopant profilesProceedings paper