Estimation of the adhesion strength of particles/residues and gate structures for calculating the damage threshold of patterned silicon wafers during physical force assisted cleans

Halder, SandipSandipHalderKim, Tae-GonTae-GonKimVos, RitaRitaVosKenis, KarineKarineKenisClaes, MartineMartineClaesDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17206Estimation of the adhesion strength of particles/residues and gate structures for calculating the damage threshold of patterned silicon wafers during physical force assisted cleansProceedings paper