Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidKunnen, EddyEddyKunnenPargon, ErwineErwinePargonLuere, OlivierOlivierLuereBianchi, DavideDavideBianchi2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/216592D and 3D photoresist line roughness characterizationOral presentation