Saib, MohamedMohamedSaibLorusso, GianGianLorussoCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayKondo, TsuyoshiTsuyoshiKondoShindo, HiroyukiHiroyukiShindoEbizuka, YasushiYasushiEbizukaBan, NaomaNaomaBanIkota, MasamiMasamiIkota2023-06-082022-09-082023-06-082022978-1-5106-4981-10277-786XWOS:000844549800029https://imec-publications.be/handle/20.500.12860/40371Regularized Autoencoder for The Analysis of Multivariate Metrology DataProceedings paper10.1117/12.2613729978-1-5106-4982-8WOS:000844549800029