Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry

Nagar, MagiMagiNagarVaes, JanJanVaesEin Eli, YairYairEin Eli2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14211Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurryOral presentation