Fluid-photoresist interactions and imaging in high-index immersion lithography

Tran, H.V.H.V.TranHendrickx, EricEricHendrickxVan Roey, FriedaFriedaVan RoeyVandenberghe, GeertGeertVandenbergheFrench, R.H.R.H.French2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16322Fluid-photoresist interactions and imaging in high-index immersion lithographyJournal article