A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach

Popovici, Mihaela IoanaMihaela IoanaPopoviciTomida, KazuyukiKazuyukiTomidaSwerts, JohanJohanSwertsFavia, PaolaPaolaFaviaDelabie, AnneliesAnneliesDelabieBender, HugoHugoBenderAdelmann, ChristophChristophAdelmannTielens, HildeHildeTielensBrijs, BertBertBrijsKaczer, BenBenKaczerPawlak, MalgorzataMalgorzataPawlakKim, Min-SooMin-SooKimAltimime, LaithLaithAltimimeVan Elshocht, SvenSvenVan ElshochtKittl, JorgeJorgeKittl2021-10-192021-10-1920110031-8965https://imec-publications.be/handle/20.500.12860/19602A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approachJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201026710/abstract