Adsorption and desorption of hydrogen on Si(100) in H2 or Ar heat treatment

Uto, AtsushiAtsushiUtoSakuraba, MasaoMasaoSakurabaCaymax, MattyMattyCaymaxMurota, JunichiJunichiMurota2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18121Adsorption and desorption of hydrogen on Si(100) in H2 or Ar heat treatmentMeeting abstract