Wang, GangGangWangRosseel, ErikErikRosseelFavia, PaolaPaolaFaviaBender, HugoHugoBenderCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLoo2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18333Hiqh quality Ge epitaxial layers in narrow channels on Si (001) substratesMeeting abstract