Dose dependent phenomena arising from implantation of Er into Si

Hogg, S.M.S.M.HoggPipeleers, B.B.PipeleersVantomme, AndreAndreVantommeBender, HugoHugoBenderRichard, OlivierOlivierRichardSwart, M.M.Swart2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10600Dose dependent phenomena arising from implantation of Er into SiJournal article