Adelmann, ChristophChristophAdelmannSchram, TomTomSchramChew, Soon AikSoon AikChewWoicik, Joseph C.Joseph C.WoicikBrizzi, SimoneSimoneBrizziTallarida, MassimoMassimoTallaridaSchmeisser, DieterDieterSchmeisserHoriguchi, NaotoNaotoHoriguchiVan Elshocht, SvenSvenVan ElshochtRagnarsson, Lars-AkeLars-AkeRagnarsson2021-10-222021-10-222014-030003-6951https://imec-publications.be/handle/20.500.12860/23469On the scalability of doped hafnia thin filmsJournal articlehttp://dx.doi.org/10.1063/1.4870075