Sealed ultra low-k organosilica films with unprecedented electrical and mechanical properties

Goethals, F.F.GoethalsLevrau, E.E.LevrauPollefeyt, G.G.PollefeytBaklanov, MikhaïlMikhaïlBaklanovCiofi, IvanIvanCiofiVanstreels, KrisKrisVanstreelsDetavernier, C.C.DetavernierVan Driessche, I.I.Van DriesscheVan Der Voort, P.P.Van Der Voort2021-10-212021-10-2120132050-7526https://imec-publications.be/handle/20.500.12860/22407Sealed ultra low-k organosilica films with unprecedented electrical and mechanical propertiesJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2013/tc/c3tc30522h#!divAbstract