Silicon-on-insulator spectral filters fabricated with CMOS technology

Bogaerts, WimWimBogaertsSelvaraja, ShankarShankarSelvarajaDumon, PieterPieterDumonBrouckaert, JoostJoostBrouckaertDe Vos, KatrienKatrienDe VosVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-182021-10-1820101077-260Xhttps://imec-publications.be/handle/20.500.12860/16769Silicon-on-insulator spectral filters fabricated with CMOS technologyJournal article