Effect of film thickness variation on (100)-surface texturing of MPS processed polycrystalline Si films

Chahal, MonicaMonicaChahalvan der Wilt, Paul C.Paul C.van der WiltVan Gestel, DriesDriesVan GestelLimanov, A.B.A.B.LimanovChitu, Adrian M.Adrian M.ChituIm, James S.James S.Im2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20431Effect of film thickness variation on (100)-surface texturing of MPS processed polycrystalline Si filmsProceedings paperhttp://dx.doi.org/10.1557/opl.2012.1400