Wet-Chemical Etching of Metals for Advanced Semiconductor Technology Nodes: Cu Recess Etching and Electrochemistry of Nanopatterned Metal Electrodes

Philipsen, HaroldHaroldPhilipsenPasquali, MattiaMattiaPasqualiGeraerts, NielNielGeraertsArmini, SilviaSilviaArmini2025-03-212025-03-212025-MAR 11438-1656WOS:001443362200001https://imec-publications.be/handle/20.500.12860/45427Wet-Chemical Etching of Metals for Advanced Semiconductor Technology Nodes: Cu Recess Etching and Electrochemistry of Nanopatterned Metal ElectrodesJournal article10.1002/adem.202402250WOS:001443362200001BIMETALLIC CORROSIONCOPPERNANOELECTRODESRESISTIVITYRUTHENIUMCHEMISTRYARRAYS