High-Q RF inductors on standard silicon realized using wafer-level packaging techniques

Carchon, GeertGeertCarchonJenei, SnezanaSnezanaJeneiCarbonell, LaureLaureCarbonellVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutereDe Raedt, WalterWalterDe RaedtMaex, KarenKarenMaexBeyne, EricEricBeyne2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7281High-Q RF inductors on standard silicon realized using wafer-level packaging techniquesProceedings paper