Grillaert, JoostJoostGrillaertMeuris, MarcMarcMeurisVrancken, EviEviVranckenDevriendt, KatiaKatiaDevriendtFyen, WimWimFyenHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3472Modelling the influence of pad bending on the planarization performance during CMPOral presentation