Replacement fin processing for III-V on Si: From FinFets to nanowires

Waldron, NiamhNiamhWaldronMerckling, ClementClementMercklingTeugels, LieveLieveTeugelsOng, PatrickPatrickOngSebaai, FaridFaridSebaaiBarla, KathyKathyBarlaCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-232021-10-2320160038-1101https://imec-publications.be/handle/20.500.12860/27563Replacement fin processing for III-V on Si: From FinFets to nanowiresJournal articlehttp://www.sciencedirect.com/science/article/pii/S0038110115002737