Martin Hoyas, AnaAnaMartin HoyasTravaly, YoussefYoussefTravalySchuhmacher, JorgJorgSchuhmacherSajavaara, T.T.SajavaaraWhelan, CarolineCarolineWhelanEyckens, BrendaBrendaEyckensRichard, OlivierOlivierRichardGiangrandi, SimoneSimoneGiangrandiBrijs, BertBertBrijsJonas, A.M.A.M.JonasVantomme, A.A.VantommeVandervorst, WilfriedWilfriedVandervorstCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10865Growth and characterization of atomic layer deposited WCxNyOral presentation