De Witte, HildeHildeDe WitteDe Gendt, StefanStefanDe GendtDouglas, M.M.DouglasConard, ThierryThierryConardKenis, KarineKarineKenisMertens, PaulPaulMertensVandervorst, WilfriedWilfriedVandervorstGijbels, RenaatRenaatGijbels2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3384Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistributionProceedings paper