Cubaynes, F.N.F.N.CubaynesVenezia, V.C.V.C.Veneziavan der marel, C.C.van der marelSnijders, J.H.M.J.H.M.SnijdersEveraert, Jean-LucJean-LucEveraertShi, XiaopingXiaopingShiRothschild, AudeAudeRothschildSchaekers, MarcMarcSchaekers2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10269Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectricsJournal article