Comparison of positively and negatively charged layered inorganic electrets for high operational temperatures

Leonov, VladimirVladimirLeonovGoedbloed, MartijnMartijnGoedbloedvan Schaijk, RobRobvan SchaijkVan Hoof, ChrisChrisVan Hoof2021-10-192021-10-192011-09https://imec-publications.be/handle/20.500.12860/19282Comparison of positively and negatively charged layered inorganic electrets for high operational temperaturesProceedings paper