Influence of test structure design on stress-induced-voiding using an experimentally validated finite element modeling approach

Lofrano, MelinaMelinaLofranoCroes, KristofKristofCroesDe Wolf, IngridIngridDe WolfWilson, ChrisChrisWilson2021-10-192021-10-1920110026-2714https://imec-publications.be/handle/20.500.12860/19327Influence of test structure design on stress-induced-voiding using an experimentally validated finite element modeling approachJournal article