Ling, FangzhouFangzhouLingDe Coster, JeroenJeroenDe CosterLin, Wan-YuWan-YuLinWitvrouw, AnnAnnWitvrouwCelis, Jean-PierreJean-PierreCelisDe Wolf, IngridIngridDe Wolf2021-10-202021-10-2020120924-4247https://imec-publications.be/handle/20.500.12860/21033Investigation of temporary stiction in poly-SiGe micromirror arraysJournal article