Eslava Fernandez, SalvadorSalvadorEslava FernandezEymery, GuillaumeGuillaumeEymeryFoubert, PhilippePhilippeFoubertIacopi, FrancescaFrancescaIacopiMaex, KarenKarenMaexBaklanov, MikhaïlMikhaïlBaklanov2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12134Optical absorption and characteristics of low-k films and barrier layers in the UV rangeMeeting abstract