Claeys, CorCorClaeysBargallo Gonzalez, MireiaMireiaBargallo GonzalezEneman, GeertGeertEnemanHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooSimoen, EddyEddySimoen2021-10-182021-10-1820101555-9270https://imec-publications.be/handle/20.500.12860/16886Electrical defects in heteroepitaxial nanometer CMOS technologyJournal article