Geometry effect on impurity incorporation and grain growth in narrow copper lines

Zhang, WenqiWenqiZhangBrongersma, SywertSywertBrongersmaHeylen, NancyNancyHeylenBeyer, GeraldGeraldBeyerVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11602Geometry effect on impurity incorporation and grain growth in narrow copper linesJournal article