Erismis, Mehmet AkifMehmet AkifErismisPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-172021-10-1720090924-4247https://imec-publications.be/handle/20.500.12860/15282Saw tooth vernier ratchets for electrostatic inchworm actuatorsJournal article