Qiao, FengyingFengyingQiaoArreghini, AntonioAntonioArreghiniBlomme, PieterPieterBlommeDate, LucienLucienDateVan den Bosch, GeertGeertVan den BoschLiyang, PanPanLiyangJun, XuXuJunVan Houdt, JanJanVan Houdt2021-10-212021-10-2120130741-3106https://imec-publications.be/handle/20.500.12860/22963Reliability comparison of ISSG oxide and HTO as tunnel dielectric in 3-D–SONOS applicationsJournal article