Shift and ratio method revisited: extraction of fin width in multi-gate devices

Collaert, NadineNadineCollaertDixit, AbhisekAbhisekDixitKottantharayil, AnilAnilKottantharayilRooyackers, RitaRitaRooyackersVeloso, AnabelaAnabelaVelosoDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152004-03https://imec-publications.be/handle/20.500.12860/8707Shift and ratio method revisited: extraction of fin width in multi-gate devicesProceedings paper