Vandervorst, WilfriedWilfriedVandervorstKumar, ArulArulKumarMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteConard, ThierryThierryConardNuytten, ThomasThomasNuyttenHantschel, ThomasThomasHantschelLoo, RogerRogerLoo2021-10-232021-10-232015-05https://imec-publications.be/handle/20.500.12860/26100Advances in metrology for complex epitaxial systems embedded in small volumsMeeting abstract