Tettamanzi, G.C.G.C.TettamanziLansbergen, G.P.G.P.LansbergenVerduijn, J.J.VerduijnRahman, R.R.RahmanPaul, A.A.PaulLee, S.S.LeeCollaert, NadineNadineCollaertBiesemans, SergeSergeBiesemansKlimeck, G.G.KlimeckRogge, S.S.Rogge2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18076Innovative characterization techniques for ultra-scaled FinFETsProceedings paper