Plasma induced low-k modification and its impact on reliability

Tokei, ZsoltZsoltTokeiBaklanov, MikhaïlMikhaïlBaklanovCiofi, IvanIvanCiofiLi, YunlongYunlongLiUrbanowicz, AdamAdamUrbanowicz2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12978Plasma induced low-k modification and its impact on reliabilityJournal article