Fabrication of high-Q silicon nitride microdisk resonator coupled with on-chip waveguide

Xie, WeiqiangWeiqiangXieVan Thourhout, DriesDriesVan Thourhout2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24846Fabrication of high-Q silicon nitride microdisk resonator coupled with on-chip waveguideProceedings paper