Vanpaemel, JohannesJohannesVanpaemelMasahito, SugiuraSugiuraMasahitoCott, DaireDaireCottvan der Veen, MarleenMarleenvan der VeenTokei, ZsoltZsoltTokeiDe Gendt, StefanStefanDe GendtVereecken, PhilippePhilippeVereecken2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23302Low temperature CNT growth kinetics for interconnectsMeeting abstract