On the nucleation of PdSi and NiSi2 during the ternary Ni(Pd)/Si(100) reaction

Schrauwen, AnneloreAnneloreSchrauwenDemeulemeester, JelleJelleDemeulemeesterKumar, ArulArulKumarVandervorst, WilfriedWilfriedVandervorstComrie, CCComrieTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantomme2021-10-212021-10-2120130021-8979https://imec-publications.be/handle/20.500.12860/23054On the nucleation of PdSi and NiSi2 during the ternary Ni(Pd)/Si(100) reactionJournal articlehttp://scitation.aip.org/content/aip/journal/jap/114/6/10.1063/1.4818333