A wet etching technique to reveal threading dislocations in thin germanium layers

Souriau, LaurentLaurentSouriauTerzieva, ValentinaValentinaTerzievaMeuris, MarcMarcMeurisCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14505A wet etching technique to reveal threading dislocations in thin germanium layersProceedings paper