Stowers, JasonJasonStowersAnderson, JeremyJeremyAndersonCardineau, BrianBrianCardineauClark, BenjaminBenjaminClarkDe Schepper, PeterPeterDe SchepperEdson, JosephJosephEdsonGreer, MichaelMichaelGreerJiang, KaiKaiJiangKocsis, MichaelMichaelKocsisMeyers, StephenStephenMeyersTelecky, AlanAlanTeleckyGrenville, AndrewAndrewGrenvilleDe Simone, DaniloDaniloDe SimoneGillijns, WernerWernerGillijnsVandenberghe, GeertGeertVandenberghe2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27355Metal oxide EUV photoresist performance for N7 relevant patterns and processesProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2508776