Ackaert, J.J.AckaertLowe, A.A.LoweDe Backer, E.E.De BackerBoonen, S.S.BoonenYao, T.T.YaoVan Houdt, JanJanVan HoudtHaspeslagh, LucLucHaspeslagh2021-10-152021-10-152004-05https://imec-publications.be/handle/20.500.12860/8461Plasma damage in HIMOSTM non-volatile memories (NVM)Proceedings paper